Low Flow Sealing Systems

Type

Part Number

Description

MS-028-062

MicroSeal for SEMI PR3.1 Compliant Designed for seal port counter
bore0.29”dia. x 0.024” depth, 0.18”dia. flow path

MSA-028-111

MicroSeal assy., SEMI PR3.1 Compliant Used on Mass Flow Controller,
1-1/8” Surface Mount

MSA-028-111-F

MicroSeal assy., SEMI PR3.1 Compliant Used on Flange Connector,
Celerity K1S modular systems

MSA-028-111-M

MicroSeal assy., SEMI PR3.1 Compliant Used on Manifold Connector,
Celerity K1S modular systems

MSA-028-111-M86

MicroSeal assy., SEMI PR3.1 Compliant Used on Manifold Connector,
Celerity K1S modular systems (0.86” L.)

MSA-028-211

MicroSeal assy., SEMI PR3.1 Compliant Used on Component, 2 Port
Surface Mount 1-1/8” Interface

MSA-028-311

MicroSeal assy., SEMI PR3.1 Compliant Used on Component, 3 Port
Surface Mount 1-1/8” Interface

MSA-028-115

MicroSeal assy., SEMI PR3.1 Compliant Used on Mass Flow Controller,
1-1/2” Surface Mount

MSA-028-115M-SW

MicroSeal Assembly, Series 60 Surface Mount,
1 Position Manf. 1.5", Swagelok

MSA-028-215

MicroSeal assy., SEMI PR3.1 Compliant Used on Component, 2 Port
Surface Mount 1-1/2” Interface

MSA-028-315

MicroSeal assy., SEMI PR3.1 Compliant Used on Component, 3 Port
Surface Mount 1-1/2” Interface

High Flow Sealing Systems

MS-043-062

MicroSeal for High Flow Designed for seal port counter bore
0.44”dia. x 0.024” depth, 0.30”dia. flow path

MSA-043-115

MicroSeal assy., High Flow Used on Mass Flow Controller,
1-1/2” Surface Mount

MSA-043-115-F

MicroSeal assy., High Flow Used on Flange Connector,
Celerity K1H modular systems

MSA-043-215

MicroSeal assy., High Flow Used on Component,
2 Port Surface Mount 1-1/2” Interface

MSA-043-315

MicroSeal assy., High Flow Used on Component,
3 Port Surface Mount 1-1/2” Interface

Custom Products

MSA-028-111-U

MicroSeal assy., Single seal port Surface Mount 1-1/8” Interface

MS-028-062-XXX

MicroSeal for SEMI PR3.1 Compliant Designed to replace MS-028-062 when a flow
restrictor is required. Suffix -XXX is orifice size in 1/1000”. Suffix –000 means plug seal

MS-043-062-XXX

MicroSeal for High Flow Designed to replace MS-043-062 when a flow restrictor is
required. Suffix -XXX is orifice size in 1/1000”. Suffix –000 means plug seal

MS-043-062-XXX-PV

MicroSeal Custom Design

For dimensional drawings view Resources.

I Home I Company I News I Products I Inquiries I Resources I

© 2004 Microflex Technologies, LLC 1185 E Stanford Ct., Anaheim, CA 92805 USA
Phone 714.937.1507 • Fax 714.937.1549 • info@microflexseals.com