MicroSeal™ is synonymous with high yield.

Traditional seals with hard, low-compliance, low-rebound characteristics, often leak so it is difficult to obtain first-pass leak free assembly.

A MicroSeal is different.

  • The patented 316 L Double Melt Stainless Steel “soft seal” process delivers exceptional plastic forming characteristics. However, that’s not all. MicroSeal’s unique structural elasticity provides the highest rebound, resulting in positive sealing every time.

  • MicroSeal is the lowest compression seal on the market. In fact, it requires 20% less compression force than traditional designs. “I-beam” type seals require tremendous load to perform properly. This results in a crushed seal, which breaks off particles into the process gas. MicroSeal spreads the load over a radius surface resulting in a smooth surface finish. As a result, MicroSeal will not damage the surface of the mating component or introduce particle contamination.

  • MicroSeal’s unique single point sealing design eliminates virtual leaks caused by other seals resulting in faster pump down times.

The result? As the first seal designed exclusively for rigorous semiconductor requirements, MicroSeal offers you the highest first pass assembly yield. High yield also means high reliability and repeatability.

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